The effects of PtxSi growth on the redistribution of p-type dopants in silicon
- 1 June 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 104 (1-2) , 215-220
- https://doi.org/10.1016/0040-6090(83)90564-3
Abstract
No abstract availableKeywords
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