Nanoimprint Lithography and Lithographically Induced Self-Assembly
- 1 July 2001
- journal article
- Published by Springer Nature in MRS Bulletin
- Vol. 26 (7) , 512-517
- https://doi.org/10.1557/mrs2001.122
Abstract
Our ability to pattern nanostructures offers a unique path to discovery and innovation in science and technology. When nanostructures are smaller than a fundamental physical length scale, conventional theory may no longer apply, and new phenomena emerge.Keywords
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