Arsenic surfactant effects and arsenic mediated molecular beam epitaxial growth for cubic GaN
- 1 June 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (23) , 3056-3058
- https://doi.org/10.1063/1.121539
Abstract
Small amounts of As residual pressure were found to affect the structure of cubic GaN growing surfaces in molecular beam epitaxy growth, i.e., modification of surface reconstruction structures, stabilization of reconstructed flat surfaces at high substrate temperatures, and preferential growth of the cubic phase. These As surfactant effects are discussed in relation to the atomic arrangement of the As-passivated surface of GaN. It was shown that the quality of cubic GaN epilayers can be improved by utilizing a small amount of As residual pressure.Keywords
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