MEMS-Micropumps: A Review
Top Cited Papers
- 28 May 2002
- journal article
- review article
- Published by ASME International in Journal of Fluids Engineering
- Vol. 124 (2) , 384-392
- https://doi.org/10.1115/1.1459075
Abstract
Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.Keywords
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