Hybrid-assembled micro dosing system using silicon-based micropump/ valve and mass flow sensor
- 1 June 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 69 (1) , 85-91
- https://doi.org/10.1016/s0924-4247(98)00039-9
Abstract
No abstract availableKeywords
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