A balanced dual-diaphragm resonant pressure sensor in silicon
- 1 March 1990
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 37 (3) , 648-653
- https://doi.org/10.1109/16.47769
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Optically excited resonant beam pressure sensorElectronics Letters, 1987
- Silicon-to-silicon direct bonding methodJournal of Applied Physics, 1986
- Wafer bonding for silicon-on-insulator technologiesApplied Physics Letters, 1986
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- Resonant diaphragm pressure measurement system with ZnO on Si excitationSensors and Actuators, 1983
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979
- 0n the Use of Resonant Diaphragms as FM Pressure TransducersIEEE Transactions on Industrial Electronics and Control Instrumentation, 1978