RBS, infrared and diffraction compared analysis of SiC synthesis in C implanted silicon
- 30 November 1980
- journal article
- Published by Elsevier in Materials Research Bulletin
- Vol. 15 (11) , 1557-1565
- https://doi.org/10.1016/0025-5408(80)90235-4
Abstract
No abstract availableKeywords
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