Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators
- 1 March 2004
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 111 (1) , 71-78
- https://doi.org/10.1016/j.sna.2003.10.021
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- Thin film resonators and filtersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Ultra-miniature high-Q filters and duplexers using FBAR technologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- High-Q VHF micromechanical contour-mode disk resonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Poly-SiGe: A High-Q Structural Material for Integrated RF MEMSPublished by Transducer Research Foundation Inc. (TRF) ,2002
- Physical and structural properties of ZnO sputtered filmsMaterials Letters, 2001
- Surface micromachined piezoelectric resonant beam filtersSensors and Actuators A: Physical, 2001
- Piezoelectric thin film micromechanical beam resonatorsSensors and Actuators A: Physical, 2001
- Dissipation measurements of vacuum-operated single-crystal silicon microresonatorsSensors and Actuators A: Physical, 1995
- Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometryJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Compatibility of zinc oxide with silicon IC processingSensors and Actuators A: Physical, 1990