An attempt to understand the sputtering yield enhancement due to implantation of inert gases in amorphous solids
- 1 March 1984
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 2 (1-3) , 569-572
- https://doi.org/10.1016/0168-583x(84)90267-2
Abstract
No abstract availableKeywords
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