Recent progress in nanoimprint technology and its applications
Top Cited Papers
- 13 May 2004
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 37 (11) , R123-R141
- https://doi.org/10.1088/0022-3727/37/11/r01
Abstract
No abstract availableThis publication has 91 references indexed in Scilit:
- Imprint lithography for integrated circuit fabricationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2003
- Alternative LithographyPublished by Springer Nature ,2003
- Characterization of and imprint results using indium tin oxide-based step and flash imprint lithography templatesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Template fabrication schemes for step and flash imprint lithographyMicroelectronic Engineering, 2002
- Step and flash imprint lithography: Template surface treatment and defect analysisJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Step and flash imprint lithography: a new approach to high-resolution patterningPublished by SPIE-Intl Soc Optical Eng ,1999
- Sub-10 nm imprint lithography and applicationsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- A Long Pollen Record from Lowland Amazonia: Forest and Cooling in Glacial TimesScience, 1996
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995