LiNbO_3 platforms for optical fiber alignment
- 15 July 1998
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 23 (14) , 1138-1140
- https://doi.org/10.1364/ol.23.001138
Abstract
A technique for incorporating a groove into a substrate is described. Both V grooves for fiber alignment and vertical grooves for waveguide end-face formation can be fabricated with this technique. The proposed fabrication method is based on an excimer-laser ablation and a high-speed rotation saw cut for . The former process provides a variety of cross-sectional groove shapes by changing the ablation mask shape of , and the latter provides an optical-quality cutting face. The proposed fabrication method is simple and provides low-cost optical platforms not only for but also for glasses, polymers, and semiconductors.
Keywords
This publication has 6 references indexed in Scilit:
- Low cost monomode, integrated optics polymeric components with passive fibre-chip couplingElectronics Letters, 1997
- Electrochemical micromachining of silicon platformsfor optical fibre alignmentElectronics Letters, 1997
- Sub-band-gap laser micromachining of lithium niobateApplied Physics Letters, 1995
- Silicon micromachining for micro-replicationtechnologiesElectronics Letters, 1994
- Practical method of waveguide-to-fiber connection: direct preparation of waveguide endface by cutting machine and reinforcement using ruby beadsApplied Optics, 1990
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978