Spatial resolution tests of scanning Auger microscopy under different topographical conditions
- 1 June 1989
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 14 (6-7) , 401-406
- https://doi.org/10.1002/sia.740140618
Abstract
No abstract availableKeywords
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- Monte Carlo calculations of the spatial resolution in a scanning auger electron microscopeSurface Science, 1978
- A ratio technique for micro-Auger analysisSurface Science, 1977