Investigation of gray-scale technology for large area 3D silicon MEMS structures
Open Access
- 30 December 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 13 (2) , 170-177
- https://doi.org/10.1088/0960-1317/13/2/302
Abstract
No abstract availableKeywords
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