Analysis of Al in silicon on sapphire films and bulk silicon
- 31 December 1982
- journal article
- research article
- Published by Elsevier in Applications of Surface Science
- Vol. 14 (1) , 128-133
- https://doi.org/10.1016/0378-5963(82)90047-2
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Carrier Transport in Thin Silicon FilmsJournal of Applied Physics, 1968
- Electrical Properties of Silicon Films Grown Epitaxially on SapphireJournal of Applied Physics, 1967
- Autodoping of Silicon Films Grown Epitaxially on SapphireJournal of the Electrochemical Society, 1966
- Al Redistribution in Thermally Oxidized Si SurfaceJournal of the Physics Society Japan, 1963