Reactive ion etching of diamond and diamond-like carbon films
- 30 April 1994
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 3 (4-6) , 645-649
- https://doi.org/10.1016/0925-9635(94)90241-0
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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