Mono- and polycrystalline silicon emitters for bipolar transistors grown by molecular beam epitaxy

This publication has 2 references indexed in Scilit:

• Performance and processing line integration of a silicon molecular beam epitaxy system
  Thin Solid Films, 1990
• Self-aligned complementary bipolar transistors fabricated with a selective-oxidation mask
  IEEE Transactions on Electron Devices, 1987