Aligned island formation using step-band networks on Si(111)
- 15 September 1999
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 86 (6) , 3083-3088
- https://doi.org/10.1063/1.371171
Abstract
We have achieved control of island formation using a patterned Si(111) surface with a periodic array of atomic-step bands and holes. Liquid metals, Au–Si or Ga, migrate on the patterned surface by annealing and form an island at a particular position in each pattern unit. The islands show highly uniform positions and narrow size distributions. To obtain such good uniformity, the diffusion length of surface atoms should be comparable with the pattern period. High mobility on step bands is also a necessary factor. Periodic arrays of Au islands are used as seeds for selective growth using a vapor-liquid-solid reaction.This publication has 19 references indexed in Scilit:
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