High quality self-nucleated AlxGa1−x N layers on (00.1) sapphire by low-pressure metalorganic chemical vapor deposition

Abstract
High quality AlxGa1−xN alloy films with xx (Vegard’s law is obeyed) and that homogeneous and inhomogeneous strain and alloy clustering are minimized in these self‐nucleated AlxGa1−xN films. Consistent with their reduced strain and chemical uniformity, the derived optical band gaps of these AlxGa1−xN films also show a linear dependence on alloy composition x, yielding a bowing parameter b≊0 eV.