Damage created in silicon by 1 MeV O+ ions as a function of beam power
- 1 January 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 62 (3) , 309-313
- https://doi.org/10.1016/0168-583x(92)95247-o
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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