Synthesis of AlN by reactive sputtering
- 18 December 1997
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 50 (1-3) , 272-276
- https://doi.org/10.1016/s0921-5107(97)00174-8
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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