Preparation of c-Axis Oriented AlN Thin Films by Low-Temperature Reactive Sputtering
- 1 October 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (10R)
- https://doi.org/10.1143/jjap.31.3446
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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