Mass Spectrometric Study of Sputtering of KB by Low-Energy Ar+ and Xe+ Ions
- 1 March 1972
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 43 (3) , 863-866
- https://doi.org/10.1063/1.1661295
Abstract
A KBr target was bombarded normally with Ar+ and Xe+ ions, with energies ranging from 25 to 180 eV, in the source of a mass spectrometer capable of detecting neutral and negative sputtered species. A relatively strong signal of Br− ions sputtered from the target was detected, and relative sputtering yield curves were obtained. The yield was greater for Ar+ than for Xe+ ion bombardment at all ion energies. No neutral K0 or Br0 atoms, nor KBr0 molecules, were detected as having been sputtered from the target during bombardment.This publication has 7 references indexed in Scilit:
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