Characteristics of Optical CCD as an X-Ray Image Sensor
- 1 April 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (4R)
- https://doi.org/10.1143/jjap.27.670
Abstract
We report here on the characteristics of a CCD for optical use in the several keV region. The CCD we used was an interline-transfer type device. We took X-ray images at energies of about 8 and 1.5 keV for various objects. We found that this device could yield sufficient information for a two-dimensional image. The spatial resolution is up to the individual pixel size(23×27 µm). The efficiency for X-rays is much superior to that of film. We measured the pulse-height distribution of X-rays in a photon-counting mode. We obtained a linear relation between the incident photon energy and the pulse height, while the energy resolution was kept constant. The effective depth of the depletion layer of this device was calculated as being about 3 µm from these measurements. We discuss the problems which must be faced in fabricating the CCD for X-ray use.Keywords
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