Damage formation and recovery in C+-irradiated 6H–SiC
- 1 January 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 148 (1-4) , 562-566
- https://doi.org/10.1016/s0168-583x(98)00716-2
Abstract
No abstract availableKeywords
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