Damage accumulation and annealing in 6H–SiC irradiated with Si+
- 1 September 1998
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 143 (3) , 333-341
- https://doi.org/10.1016/s0168-583x(98)00381-4
Abstract
No abstract availableKeywords
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