Growth of GaAs on Si Substrates by Metalorganic MBE Using Triethylgallium and Arsenic

Abstract
GaAs layers are epitaxially grown on (100) Si substrates by metalorganic MBE (MOMBE) using triethylgallium and solid arsenic. All epilayers show p-type conductivity caused by carbon incorporation. The reproducibly obtained single-domain GaAs epilayers have almost featureless morphology. The X-ray diffraction measurements indicate that the MOMBE-grown layer is of high crystalline quality. The 4 K photoluminescence spectrum exhibits a strong, excitonic transition peak with a linewidth of 4.9 meV. These results can compete with those reported previously for the MOCVD-grown GaAs on Si.