Studies on nitridation of laser evaporated III–IV group elements with gaseous ammonia and thin film deposition
- 1 February 1997
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 122 (3) , 415-419
- https://doi.org/10.1016/s0168-583x(96)00671-4
Abstract
No abstract availableKeywords
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