Heteroepitaxial growth of Ge on (100) Si by ultrahigh vacuum, chemical vapor deposition
- 30 December 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (27) , 3574-3576
- https://doi.org/10.1063/1.105636
Abstract
The heteroepitaxial growth of pure Ge films on (100) Si by an ultrahigh vacuum, chemical vapor deposition technique is reported for the first time. The growth mode is found to be critically dependent on the substrate temperature during deposition. Two temperature regimes for growth are observed. Between 300 and 375 °C, growth occurs in a two‐dimensional, layer‐by‐layer mode, with an activation energy of 1.46 eV. Above 375 °C, island formation is observed. In the low‐temperature regime the growth rate is controlled by a surface decomposition reaction, whereas in the high‐temperature regime the growth rate is controlled by diffusion and adsorption from the gas phase.Keywords
This publication has 23 references indexed in Scilit:
- Graded-SiGe-base, poly-emitter heterojunction bipolar transistorsIEEE Electron Device Letters, 1989
- Technological Prospects for Germanium Silicide EpitaxyMRS Proceedings, 1988
- Thin epitaxial Ge−Si(111) films: Study and control of morphologySurface Science, 1987
- Enhancement- and depletion-mode p-channel GexSi1-xmodulation-doped FET'sIEEE Electron Device Letters, 1986
- Avalanche gain in GexSi1-x/Si infrared waveguide detectorsIEEE Electron Device Letters, 1986
- Selective Ge deposition on Si using thermal decomposition of GeH4Applied Physics Letters, 1985
- Investigation of crystallographic properties of thin germanium crystals grown on silicon substrates by chemical vapor depositionThin Solid Films, 1983
- The heteroepitaxy of Ge on Si: A comparison of chemical vapor and vacuum deposited layersJournal of Applied Physics, 1982
- Pseudomorphic Structure at the Interface of Ge on Si(111) Studied by High-Energy-Ion ScatteringPhysical Review Letters, 1981
- Heteroepitaxy of germanium thin films on silicon by ion sputteringJournal of Crystal Growth, 1974