X-ray photoelectron spectroscopy of O 1s and Si 2p lines in films of SiOx formed by electron beam evaporation
- 1 February 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 157 (2) , 351-360
- https://doi.org/10.1016/0040-6090(88)90016-8
Abstract
No abstract availableKeywords
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