Plasma Deposition of a-Si:H

This publication has 21 references indexed in Scilit:

• Infrared Absorption ina-Si: H: First Observation of Gaseous MolecularH2and Si-H Overtone
  Physical Review Letters, 1984
• Step coverage simulation and measurement in a dc planar magnetron sputtering system
  Journal of Applied Physics, 1983
• Spectroscopic detection of silylene in the infrared multiphoton decomposition of silane
  Applied Physics Letters, 1983
• High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 range
  The Journal of Chemical Physics, 1982
• A study of the silane glow discharge deposition by isotopic labelling
  Thin Solid Films, 1981
• New insights on growth mechanism of a-Si:H from optical emission spectroscopy
  AIP Conference Proceedings, 1981
• Novel effects of magnetic field on the silane glow discharge
  Applied Physics Letters, 1980
• Microstructure of plasma-deposited a-Si : H films
  Applied Physics Letters, 1979
• Columnar microstructure in vapor-deposited thin films
  Thin Solid Films, 1977
• The absorption spectrum of the free SiH₂ radical
  Canadian Journal of Physics, 1968