Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD
- 1 December 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 236 (1-2) , 58-63
- https://doi.org/10.1016/0040-6090(93)90642-3
Abstract
No abstract availableKeywords
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