Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition
- 1 November 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 21 (6) , 2737-2741
- https://doi.org/10.1116/1.1630329
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Nozzle-Nanostructure Fabrication on Glass Capillary by Focused-Ion-Beam Chemical Vapor Deposition and EtchingJapanese Journal of Applied Physics, 2003
- Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor DepositionJapanese Journal of Applied Physics, 2003
- Graphitization of Fe-doped amorphous carbon pillars grown by focused-ion-beam-induced chemical-vapor depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001
- Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Lateral growth of focused ion beam deposited platinum for stencil mask repairJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999