Growth, composition and structure of plasma-deposited siloxane and silazane
- 1 September 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 217 (1-2) , 17-25
- https://doi.org/10.1016/0040-6090(92)90600-g
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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