Sinusoidally phase-modulated interference microscope for high-speed high-resolution topographic imagery
- 1 December 2001
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 26 (23) , 1873-1875
- https://doi.org/10.1364/ol.26.001873
Abstract
We describe an interference microscope that produces topographic images with a minimum acquisition time of 20 ms. The system is based on phase-shifting interferometry with sinusoidal phase modulation induced by the oscillation of an interferometric objective (Michelson or Mirau). A CCD camera captures four images per oscillation period to produce a phase map in real time. The system is installed on a commercial microscope.Keywords
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