Characterization of CuAlS2 Films Grown by Molecular Beam Epitaxy

Abstract
Undoped and As-doped CuAlS2 films have been grown on GaAs(100) substrates by molecular beam epitaxy, and their optical and electrical properties have been characterized. X-ray diffraction patterns show that the films grow epitaxially with the c-axis perpendicular to the substrate surface. Both undoped and As-doped CuAlS2 films have exhibited a near-band-edge emission around 3.4 eV with accompanying deep-level-related emissions at 77 K. An As-doped CuAlS2 film exhibits p-type conductivity with the lowest resistivity of 1 Ω·cm and the carrier concentration of 5×1017 cm-3.

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