Boron-implanted silicon resistors
- 31 October 1977
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 20 (10) , 803-812
- https://doi.org/10.1016/0038-1101(77)90168-x
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Solute diffusion in plastically deformed silicon crystalsBritish Journal of Applied Physics, 1967
- Electrical Properties of Silicon Containing Arsenic and BoronPhysical Review B, 1954