An elementary model of neutral and ion sputtering yields
- 1 January 1981
- journal article
- Published by Elsevier in Surface Science
- Vol. 102 (2-3) , 578-587
- https://doi.org/10.1016/0039-6028(81)90047-9
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- A statistical model of sputteringJournal of Applied Physics, 1979
- A model of the ion sputtering processSurface Science, 1978
- Sputtering of Au by 45-keV ions for different fluencesApplied Physics Letters, 1976
- A new theory of SIMS at metal surfacesSurface Science, 1976
- Developments in secondary ion mass spectroscopy and applications to surface studiesSurface Science, 1975
- Energy density and time constant of heavy-ion-induced elastic-collision spikes in solidsApplied Physics Letters, 1974
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion BombardmentJournal of Applied Physics, 1962
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955