Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials
- 1 December 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 166, 317-323
- https://doi.org/10.1016/0040-6090(88)90393-8
Abstract
No abstract availableKeywords
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