Optical emission patterns and microwave field distributions in a cylindrical microwave plasma source
- 1 June 2001
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 390 (1-2) , 197-201
- https://doi.org/10.1016/s0040-6090(01)00919-1
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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