Two-dimensional profiling of shallow junctions in Si metal-oxide-semiconductor structures using scanning tunneling spectroscopy and transmission electron microscopy
- 15 February 1996
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 79 (4) , 2115-2121
- https://doi.org/10.1063/1.361069
Abstract
No abstract availableThis publication has 27 references indexed in Scilit:
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