Adhesion improvement in diamond films by microlithographic patterning
- 1 January 1992
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 27 (2) , 553-556
- https://doi.org/10.1007/bf00543949
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Experimental Observations of Substrate Fracture Caused by Residually Stressed FilmsJournal of the American Ceramic Society, 1990
- Focused ion-beam crater arrays for induced nucleation of diamond filmJournal of Vacuum Science & Technology B, 1989
- Selective nucleation and growth of diamond particles by plasma-assisted chemical vapor depositionApplied Physics Letters, 1989
- Diamond—Ceramic Coating of the FutureJournal of the American Ceramic Society, 1989
- On the decohesion of residually stressed thin filmsActa Metallurgica, 1988