Measurement of High Resistivity Semiconductors Using the van der Pauw Method
- 1 June 1973
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 44 (6) , 698-700
- https://doi.org/10.1063/1.1686224
Abstract
Apparatus is described that permits measurement of the electrical transport properties of semiconductors with resistance values over 1012 Ω. The system utilizes a guarded approach to the van der Pauw method which simplifies sample geometry and contacting and permits evaluation of thin layers. The equipment is easy to operate, reliable, and constructed of readily available commercially purchased components.Keywords
This publication has 11 references indexed in Scilit:
- Double Modulation Method for Hall Effect Measurements on Photoconducting MaterialsReview of Scientific Instruments, 1972
- p-TYPE CONDUCTION IN Li-DOPED ZnSeApplied Physics Letters, 1971
- The Measurement of a High Impedance Source Having Shunt CapacitanceReview of Scientific Instruments, 1970
- A High Impedance ac Hall Effect ApparatusReview of Scientific Instruments, 1970
- High Resistivity Hall Effect MeasurementsReview of Scientific Instruments, 1968
- ION IMPLANTATION OF SILICON: II. ELECTRICAL EVALUATION USING HALL-EFFECT MEASUREMENTSCanadian Journal of Physics, 1967
- Servo-Controlled Measuring Bridge for Semiconductors of High ResistivityReview of Scientific Instruments, 1965
- Charge Transport in Copper Phthalocyanine Single CrystalsPhysical Review B, 1963
- Apparatus for the Measurement of Galvanomagnetic Effects in High Resistance SemiconductorsReview of Scientific Instruments, 1961
- Cryostat for measuring the electrical properties of high resistance semiconductors at low temperaturesJournal of Scientific Instruments, 1959