X-Ray Microprobe with a Pair of Elliptical Mirrors
- 1 September 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (9A) , L1660-1662
- https://doi.org/10.1143/jjap.28.l1660
Abstract
A grazing-incidence mirror system for focusing X-rays has been developed. Two mirrors, each with an elliptical cylinder shape, are arranged in a crossed-mirror geometry (Kirkpatrick-Baez configuration) to form an X-ray source image that is demagnified by a factor of several hundred. A focused X-ray spot of 5.5 µm×4.2 µm was obtained at a wavelength of 2.0 Å using synchrotron radiation from the KEK Photon Factory 2.5 GeV storage ring and was applied to scanning X-ray microscopy.Keywords
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