Magnetic and Crystallographical Characteristics of the Sendust Films formed by DC Opposite Sputtering Method

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Abstract
Sendust films were formed using DC opposite sputtering equipment. Then, sputtering conditions that influcne the magnetic and crystallographical characteristics of the films were studied. Sendust films with a low coercive force (< 1 Oe) and a high initial permeability (> 1000 at 6 MHz) are formed under the conditions of high sputtering gas pressures and high substrate temperatures. As the deposition rate increases, a higher substrate temperature is necessary to form films with low coercive forces. Superlattice formation and large columnar crystallites are found in the films formed at high sputtering gas pressures and high substrate temperatures; they decrease the coercive forces of the films.

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