Optical spectra of SixGe1−x alloys
- 1 April 1989
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 65 (7) , 2827-2832
- https://doi.org/10.1063/1.342720
Abstract
We report pseudodielectric functions of SixGe1−x alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.7–5.6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layered structures.This publication has 13 references indexed in Scilit:
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