From microsensors to microinstruments
- 31 August 1996
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 56 (1-2) , 143-149
- https://doi.org/10.1016/0924-4247(96)01289-7
Abstract
No abstract availableKeywords
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- A gas chromatographic air analyzer fabricated on a silicon waferIEEE Transactions on Electron Devices, 1979