Reactive deposition of hard coatings
- 1 December 1989
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 39-40, 301-314
- https://doi.org/10.1016/0257-8972(89)90064-9
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
- Structure, properties and applications of TiN coatings produced by sputter ion platingVacuum, 1988
- Ion-assisted deposition and metastable structuresThin Solid Films, 1988
- Pressure stability in reactive magnetron sputteringThin Solid Films, 1988
- Ion beam bombardment effects during films depositionVacuum, 1988
- The microstructure of sputter‐deposited coatingsJournal of Vacuum Science & Technology A, 1986
- Titanium aluminum nitride films: A new alternative to TiN coatingsJournal of Vacuum Science & Technology A, 1986
- Ion-stimulated sorption: An ion-assisted technology with new possibilitiesThin Solid Films, 1986
- Monte Carlo calculation for structural modifications in ion-assisted thin film deposition due to thermal spikesJournal of Vacuum Science & Technology A, 1986
- Structure and properties of TiN coatingsThin Solid Films, 1985
- On the investigation of d.c. plasmatron discharges by optical emission spectrometryThin Solid Films, 1982