Columnar microstructures in magnetron-sputtered refractory metal thin films of tungsten, molybdenum and W-Ti-(N)
- 1 February 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 208 (2) , 181-188
- https://doi.org/10.1016/0040-6090(92)90640-w
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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