A compact, resonant cavity, five centimeter, multicusp, ECR broad-beam ion source
- 1 January 1990
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (1) , 285-287
- https://doi.org/10.1063/1.1141323
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Low power, 3.2-cm, efficient microwave electron cyclotron resonant ion sourceReview of Scientific Instruments, 1988
- Plasma etching with a microwave cavity plasma disk sourceJournal of Vacuum Science & Technology B, 1988
- The experimental test of a microwave ion beam source in oxygenJournal of Vacuum Science & Technology B, 1987
- Characterization of a 3 cm Kaufman ion source with nitrogen feed gasVacuum, 1986
- Non-mass analysed ion implantation using microwave ion sourceVacuum, 1986
- Experimental performance of a microwave cavity plasma disk ion sourceReview of Scientific Instruments, 1985
- Developments in broad-beam, ion-source technology and applicationsJournal of Vacuum Science and Technology, 1982
- Ion beam oxidationJournal of Applied Physics, 1981
- The design of a microwave plasma cavityProceedings of the IEEE, 1974