Photothermal excitation and self-excitation of silicon microresonators
- 1 November 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 39 (2) , 141-148
- https://doi.org/10.1016/0924-4247(93)80211-x
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- All-optical pressure sensor with temperature compensation on resonant PECVD silicon nitride microstructuresElectronics Letters, 1992
- Effect of optical power on the resonance frequency of optically powered silicon microresonatorsSensors and Actuators A: Physical, 1991
- Transient excitation of silicon microresonatorElectronics Letters, 1989
- Self-excited vibrations of optical microresonatorsElectronics Letters, 1988
- Novel optically excited resonant pressure sensorElectronics Letters, 1988
- Optical-fibre sensors using micromachined silicon resonant elementsIEE Proceedings D Control Theory and Applications, 1988
- Optically excited resonant beam pressure sensorElectronics Letters, 1987
- Invited Paper Silicon In OpticsPublished by SPIE-Intl Soc Optical Eng ,1987
- Micromechanical resonators in fiber-optic systemsOptics Letters, 1987
- Optically activated vibrations in a micromachined silica structureElectronics Letters, 1985